Xanadu Develops Quantum Algorithms For EUV Lithography

Xanadu and Mitsubishi Chemical on Feb. 25, 2026 released a preprint describing novel quantum simulation algorithms for extreme ultraviolet (EUV) lithography used in advanced semiconductor manufacturing. The paper presents scalable techniques that predict EUV photoabsorption spectra and targets implementation on fault-tolerant quantum computers using fewer than 500 qubits for model systems like 4‑Iodo‑2‑methylphenol. If realized, the methods could help reduce radiation-induced blurring and improve chip resolution.